Resonant MEMS: Fundamentals, Implementation, and ApplicationКНИГИ » АППАРАТУРА
Название: Resonant MEMS: Fundamentals, Implementation, and Application Автор: Oliver Brand, Isabelle Dufour Издательство: Wiley-VCH Год: 2015 Формат: PDF Размер: 7 Мб Язык: английский / English
Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.
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Resonant MEMS: Fundamentals, Implementation, and Application 
