This book reviews advances in cutting-edge micro-/nano-electrometers, and discusses the technological challenges involved in their practical implementation. The detection of electrostatic charge has a wide range of applications in ionization chambers, bio-analyte and aerosol particle instruments, mass spectrometers, scanning tunneling microscopes, and even quantum computers. Designing micro-/nano-electrometers (also known as charge sensors) for electrometry is considered vital because of the charge sensitivity and resolution issues at micro-/nano-scales. The remarkably dynamic microelectromechanical systems (MEMSs)/nanoelectromechanical systems (NEMSs), and advances in solid-state electronics, hold considerable potential for the design and fabrication of extremely sensitive charge sensors.
Micro-Cutting: Fundamentals and Applications Название: Micro-Cutting: Fundamentals and Applications (Microsystem and Nanotechnology) Автор: Dehong Huo (Editor), Kai Cheng (Editor) Издательство:...
Nano-Semiconductors: Devices and Technology Название: Nano-Semiconductors: Devices and Technology Автор: Krzysztof Iniewski Издательство: CRC Press Год: 2011 Формат: PDF Размер: 12,8 Мб Язык:...
Nano Devices and Sensors Название: Nano Devices and Sensors Автор: Juin J. Liou and Shien-Kuei Liaw Издательство: De Gruyter Год: 2016 Формат: PDF, EPUB Размер: 13 Мб Язык:...
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Micro and Nano Machined Electrometers 
